|ITEM METADATA RECORD
|Title: ||In situ transmission electron microscopy study of Ni silicide phases formed on (001) Si active lines|
|Authors: ||Teodorescu, V|
Van Landuyt, J #
|Issue Date: ||2001 |
|Series Title: ||Journal of Applied Physics vol:90 issue:1 pages:167-174|
|Publication status: ||published|
|KU Leuven publication type: ||IT|
|Appears in Collections:||Associated Section of ESAT - INSYS, Integrated Systems|
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