Title: In situ transmission electron microscopy study of Ni silicide phases formed on (001) Si active lines
Authors: Teodorescu, V
Nistor, Leona
Bender, Hugo
Steegen, A
Lauwers, A
Maex, Karen
Van Landuyt, J #
Issue Date: 2001
Series Title: Journal of Applied Physics vol:90 issue:1 pages:167-174
ISSN: 0021-8979
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
# (joint) last author

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