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Title: Improved LOCOS isolation for ultra thin 0.18 ?m fully-depleted SOI CMOS
Authors: Van Meer, Hans ×
De Meyer, Christina #
Issue Date: 2001
Host Document: pages:301-306
Conference: Proceedings 10th International Symposium on Silicon-on-Insulator Technology and Devices; 26 March 2001; Washington, D.C., USA.
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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