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Title: High-speed 3D optical imaging and failure analysis of high- and low-frequency movements in micro-electro-mechanical (MEMS) with nanometer resolution
Authors: van Spengen, Willem Merlijn ×
De Wolf, Ingrid
Puers, Robert #
Issue Date: 2001
Publisher: SPIE
Host Document: pages:268-277
Conference: Reliability, Testing, and Characterization of MEMS/MOEMS
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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