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Title: Optical imaging of high-frequency resonances and semi-static deformations in micro-electromechanical systems (MEMS)
Authors: van Spengen, Willem Merlijn ×
De Wolf, Ingrid
Puers, Robert
Vikhagen, E #
Issue Date: 2001
Host Document: pages:357-364
Conference: Proceedings of the 27th International Symposium for Testing and Failure Analysis (ISTFA); November 2001; Santa Clara, CA, USA.
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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