ITEM METADATA RECORD
Title: Dry oxidation mechanisms of copper in trenches
Authors: Carbonell, Laure ×
Ratchev, Petar
Caluwaerts, Rudy
Van Hove, Marleen
Verlinden, Bert
Maex, Karen #
Issue Date: 2002
Series Title: Microelectronic Engineering vol:64 pages:63-71
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Physical Metallurgy and Materials Engineering Section (-)
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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