Title: Dry oxidation mechanisms of copper in trenches
Authors: Carbonell, Laure ×
Ratchev, Petar
Caluwaerts, Rudy
Van Hove, Marleen
Verlinden, Bert
Maex, Karen #
Issue Date: 2002
Series Title: Microelectronic Engineering vol:64 pages:63-71
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Physical Metallurgy and Materials Engineering Section (-)
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

Files in This Item:
File Status SizeFormat
pub02120.pdf Published 780KbAdobe PDFView/Open Request a copy

These files are only available to some KU Leuven Association staff members


All items in Lirias are protected by copyright, with all rights reserved.

© Web of science