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Title: Investigation of barrier and slurry effects on the galvanic corrosion of copper
Authors: Ernur, Didem ×
Kondo, S
Shamiryan, Denis
Maex, Karen #
Issue Date: 2002
Series Title: Microelectronic Engineering vol:64 issue:01/04/07 pages:117-124
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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