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Title: Development of sub-10-nm atomic layer deposition barriers for Cu/low-k interconnects
Authors: Beyer, Gerald ×
Satta, Alessandra
Schuhmacher, Jörg
Maex, Karen
Besling, Wim
Kilpela, Olli
Sprey, Hessel
Tempel, Georg #
Issue Date: 2002
Series Title: Microelectronic Engineering vol:64 issue:01/04/07 pages:233-245
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Physics and Astronomy - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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