Title: XPS and TOFSIMS studies of shallow Si/Si1-xGex/Si layers
Authors: Conard, Thierry ×
De Witte, Hilde
Loo, Roger
Verheyden, P
Vandervorst, Wilfried
Caymax, Matty
Gijbels, Renaat #
Issue Date: 1999
Series Title: Thin Solid Films vol:343-344 pages:583-586
ISSN: 0040-6090
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.

© Web of science