Title: Optimization of junctions formed by solid phase epitaxial regrowth for sub-70nm CMOS
Authors: Lindsay, Richard ×
Pawlak, Bartek
Stolk, Peter
Maex, Karen #
Issue Date: 2002
Host Document: pages:C2.1
Conference: Silicon Front-End Junction Formation Technologies location:Leuven Belgium date:01/04/02
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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