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Title: Linewidth dependence of the reverse bias junction leakage for co-silicided source/drain junctions
Authors: Lauwers, Anne ×
de Potter de ten Broeck, Muriel
Lindsay, Richard
Chamirian, Oxana
Demeurisse, Caroline
Vrancken, Christa
Maex, Karen #
Issue Date: 2002
Publisher: MRS
Host Document: pages:29-34
Conference: Silicon Materials - Processing, Characterization, and Reliability location:Leuven Belgium date:01/04/02
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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