Title: A new ultra-low K ILD material based on organic-inorganic hybrid resins
Authors: Zhong, Ben ×
Meynen, Herman
Iacopi, Francesca
Weidner, Ken
Malhouitre, Stéphane
Moyer, Eric
Bargeron, Cory
Schalk, Paul
Peck, Alan
Van Hove, Marleen
Maex, Karen #
Issue Date: 2002
Host Document: pages:B12.4
Conference: Silicon Materials - Processing, Characterization, and Reliability location:Midland, MI USA date:01/04/02
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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