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Title: Galvanic corrosion testing of WCxNy barrier metal in H2O2 based slurries
Authors: Ernur, Didem
Schuhmacher, Jörg
Terzieva, Valentina
Shamiryan, Denis
Maex, Karen
Issue Date: 2002
Conference: Advanced Metallization Conference location:San Diego, CA, USA date:01/10/02
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems

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