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Title: Integration of atomic layer deposition barriers in single and dual damascene oxide modules
Authors: Schuhmacher, Jörg
Vos, Ingrid
Sutcliffe, Victor
Besling, Wim
Tokei, Zsolt
Beyer, Gerald
Maex, Karen
Issue Date: 2002
Conference: Advanced Metallization Conference location:San Diego, CA, USA date:01/10/02
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems

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