ITEM METADATA RECORD
Title: Barrier deposition on porous low-k films
Authors: Shamiryan, Denis
Yanovitskaya, Z.S
Iacopi, Francesca
Maex, Karen
Issue Date: 2002
Conference: Advanced Metallization Conference location:San Diego, CA, USA date:01/10/02
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems

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