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Title: Recombination activity of oxygen precipitation related defects in Si
Authors: Seifert, W ×
Kittler, M
Vanhellemont, Jan
Simoen, Eddy
Claeys, Cor
Kirscht, F. G #
Issue Date: 1996
Host Document: pages:319-24
Conference: Defect Recognition and Image Processing in Semiconductors 1995. Proceedings of the Sixth International Conference; 3-6 Dec. 1996
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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