Title: Thin (2-4nm) medium and high-k dielectrica: a challenge for physical metrology
Authors: Vandervorst, Wilfried
Issue Date: 2001
Conference: 31st European Solid-State Device Research Conference; 11-13 Sept. 2001; Nuremberg, Germany. location:Leuven Belgium
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Electrical Engineering - miscellaneous

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