|ITEM METADATA RECORD
|Title: ||Thin (2-4nm) medium and high-k dielectrica: a challenge for physical metrology|
|Authors: ||Vandervorst, Wilfried|
|Issue Date: ||2001 |
|Conference: ||31st European Solid-State Device Research Conference; 11-13 Sept. 2001; Nuremberg, Germany. location:Leuven Belgium|
|Publication status: ||published|
|KU Leuven publication type: ||DI|
|Appears in Collections:||Electrical Engineering - miscellaneous|
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