Title: Towards routine, quantitative two-dimensional carrier profiling with scanning spreading resistance microscopy
Authors: Vandervorst, Wilfried ×
Eyben, Pierre
Callewaert, Sven #
Issue Date: 2001
Host Document: pages:613-619
Conference: Characterization and Metrology for ULSI Technology 2000: International Conference; Gaithersburg, Maryland, 26-29 June 2000. location:Leuven Belgium
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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