Title: Cu deposition on Si surfaces from HF solutions in VLSI microfabrication
Authors: Teerlinck, Ivo
Mertens, Paul
Vos, Rita
Meuris, Marc
Heyns, Marc
Issue Date: 1996
Conference: 3rd European Workshop on Electrochemical Processing of Semiconductors; November 6-8, 1996; Paris, France. location:Leuven Belgium
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Clinical Residents Medicine

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