Title: Optimized HF solutions for ultra-clean Si surfaces
Authors: Teerlinck, Ivo ×
Mertens, Paul
Vos, Rita
Meuris, Marc
Heyns, Marc #
Issue Date: 1996
Host Document: pages:206-207
Conference: 1996 Symposium on VLSI Technology; 11-13 June 1996; Honolulu, HI, USA. location:Leuven Belgium
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Clinical Residents Medicine
Surface and Interface Engineered Materials
× corresponding author
# (joint) last author

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