|ITEM METADATA RECORD
|Title: ||Comparative analysis of the nucleation and growth of Cu on different low-k polymers|
|Authors: ||Zaporojtchenko, V|
|Issue Date: ||2001 |
|Conference: ||MRS Spring Meeting. Symposium L: Materials, Technology, and Reliability for Advanced Interconnects and Low-k Dielectrics; April|
|Publication status: ||published|
|KU Leuven publication type: ||DI|
|Appears in Collections:||Associated Section of ESAT - INSYS, Integrated Systems|
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