Title: Comparative analysis of the nucleation and growth of Cu on different low-k polymers
Authors: Zaporojtchenko, V
Erichsen, J
Strunskus, T
Behnke, K
Faupel, F
Baklanov, Mikhaïl
Maex, Karen
Issue Date: 2001
Conference: MRS Spring Meeting. Symposium L: Materials, Technology, and Reliability for Advanced Interconnects and Low-k Dielectrics; April
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems

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