Microelectronic Engineering
Publication date:
2001-01-01
Volume:
59
Pages:
67 -
72
Author:
Zhang, Jianjun
Zhao, CD ; Groeseneken, Guido ; Degraeve, Robin ; Ellis, JN ; Beech, CD
Keywords:
0204 Condensed Matter Physics, 0299 Other Physical Sciences, 0906 Electrical and Electronic Engineering, Applied Physics, 4009 Electronics, sensors and digital hardware, 4016 Materials engineering