Title: Identification of critical parameters for plasma process-induced damage in 130 and 100 nm CMOS technologies
Authors: Van den Bosch, Geert ×
De Jaeger, Brice
Tokei, Zsolt
Groeseneken, Guido #
Issue Date: 2002
Publisher: University of Bologna
Host Document: pages:271-274
Conference: ESSDERC - 32nd European Solid-State Device Research Conference location:Leuven Belgium date:24/09/02
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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