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Title: Influence of doping profile and halo implantation on the threshold voltage mismatach of a 0.13µm CMOS technology
Authors: Croon, Jeroen ×
Augendre, Emmanuel
Decoutere, Stefaan
Sansen, Willy
Maes, Herman #
Issue Date: 2002
Publisher: University of Bologna
Host Document: pages:579-582
Conference: ESSDERC - 32nd European Solid-State Device Research Conference location:Leuven Belgium date:24/09/02
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
ESAT - MICAS, Microelectronics and Sensors
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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