This item still needs to be validated !
|ITEM METADATA RECORD
|Title: ||Line edge roughness: characterization, modeling and impact on device behavior|
|Authors: ||Croon, Jeroen ×|
Maes, Herman #
|Issue Date: ||2002 |
|Host Document: ||pages:307-310|
|Conference: ||IEDM Technical Digest location:Leuven Belgium date:09/12/02|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||Electrical Engineering - miscellaneous|
ESAT - MICAS, Microelectronics and Sensors
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author|
# (joint) last author|
|Files in This Item:
There are no files associated with this item.
Request a copy
All items in Lirias are protected by copyright, with all rights reserved.
© Web of science