This item still needs to be validated !
Title: Line edge roughness: characterization, modeling and impact on device behavior
Authors: Croon, Jeroen ×
Storms, Greet
Winkelmeier, Stephanie
Pollentier, Ivan
Ercken, Monique
Decoutere, Stefaan
Sansen, Willy
Maes, Herman #
Issue Date: 2002
Publisher: IEEE
Host Document: pages:307-310
Conference: IEDM Technical Digest location:Leuven Belgium date:09/12/02
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
ESAT - MICAS, Microelectronics and Sensors
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.

© Web of science