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Title: Micromachined poly-SiGe bolometer arrays for infrared imaging and spectroscopy
Authors: Leonov, Vladimir
De Moor, Piet
Perova, Natalia
Goessens, Claus
Grietens, Bob
Vermeiren, Jan
Van Hoof, Chris
Issue Date: 2002
Conference: Photonics Fabrication Europe: MEMS/MOEMS for Photonic Communciations, Sensing and Metrology location:Leuven Belgium date:28/10/02
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Section Child - Miscellaneous (-)
ESAT - MICAS, Microelectronics and Sensors

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