Title: Hydrogen plasma-enhanced thermal donor formation in n-type oxygen-doped high-resistivity float-zone silicon
Authors: Simoen, Eddy ×
Claeys, Corneel
Job, R
Ulyashin, A.G
Fahrner, W.R
De Gryse, O
Clauws, P #
Issue Date: 2002
Series Title: Applied Physics Letters vol:81 issue:10 pages:1842-1844
ISSN: 0003-6951
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.

© Web of science