Title: Optimized HF solutions in ULSI technology
Authors: Teerlinck, Ivo
Mertens, Paul
Vos, Rita
Meuris, Marc
Heyns, Marc
Issue Date: 1996
Conference: Electrochemical Society 190th Fall Meeting: Symposium on Environmental Aspects of Electrochemical Technology. Applications in El location:Leuven Belgium
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Clinical Residents Medicine
Department of Materials Engineering - miscellaneous
Surface and Interface Engineered Materials

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