Title: Impact of the electrochemical properties of silicon wafer surfaces on copper outplating from HF solutions
Authors: Teerlinck, Ivo ×
Schmidt, Harald
Rotondaro, Antonio
Hurd, Trace
Mouche, Laurent
Mertens, Paul
Meuris, Marc
Heyns, Marc
Vanhaeren, Danielle
Vandervorst, Wilfried #
Issue Date: 1996
Host Document: pages:284-291
Conference: Proceedings of the Fourth International Symposium on Cleaning technology in Semiconductor Device Manufacturing; Symposium held O location:Leuven Belgium
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Clinical Residents Medicine
Electrical Engineering - miscellaneous
Surface and Interface Engineered Materials
× corresponding author
# (joint) last author

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