Title: CMOS foundry-based micromachining
Authors: Tilmans, Harrie ×
Baert, Kris
Verbist, Agnes
Puers, Robert #
Issue Date: 1996
Publisher: IOP Publishing Ltd.
Series Title: Journal of Micromechanics and Microengineering vol:6 pages:122-127
ISSN: 0960-1317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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