Title: Substrate bonding techniques for CMOS processed wafers
Authors: van der Groen, Sonja
Rosmeulen, Maarten
Baert, Kris
Jansen, Philippe
Deferm, Ludo
Issue Date: 1996
Conference: Micromechanics Europe (MME '96); October 21-22, 1996; Barcelona, Spain. location:Leuven Belgium
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Electrical Engineering - miscellaneous
ESAT - ELECTA, Electrical Energy Computer Architectures

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