Title: Feasability of TiSi2 and CoSi2 for sub quarter micron processes
Authors: Vanhaelemeersch, Serge
Baklanov, Mikhaïl
Maex, Karen
Issue Date: 1996
Conference: International Conference on Advanced Metallization and Interconnect Systems for ULSI Applications; October 1996; Boston, Mass..U location:Leuven Belgium
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.