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Title: Atomic layer deposition of barriers for interconnect
Authors: Besling, Wim ×
Satta, Alessandra
Schuhmacher, Jörg
Abell, Thomas
Sutcliffe, Victor
Martin Hoyas, Ana
Beyer, Gerald
Gravesteijn, Dirk
Maex, Karen #
Issue Date: 2002
Publisher: IEEE
Host Document: pages:288-291
Conference: Proceedings of the IEEE International Interconnect Technology Conference date:03/06/02
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Physics and Astronomy - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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