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|ITEM METADATA RECORD
|Title: ||Atomic layer deposition of barriers for interconnect|
|Authors: ||Besling, Wim ×|
Martin Hoyas, Ana
Maex, Karen #
|Issue Date: ||2002 |
|Host Document: ||pages:288-291|
|Conference: ||Proceedings of the IEEE International Interconnect Technology Conference date:03/06/02|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||Physics and Astronomy - miscellaneous|
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author|
# (joint) last author|
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