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Title: Infrared studies of oxygen precipitation related defects in silicon after various thermal treatments
Authors: Vanhellemont, Jan ×
Kissinger, G
Clauws, P
Kaniava, Arvydas
Libezny, Milan
Gaubas, Eugenijus
Simoen, Eddy
Richter, H
Claeys, Cor #
Issue Date: 1996
Series Title: Diffusion and Defect Data. B: Solid State Phenomena vol:47-48 pages:229-234
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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