Title: Light scattering tomography study of lattice defects in high quality as-grown Cz silicon wafers and their evolution during gate oxidation
Authors: Vanhellemont, Jan ×
Kissinger, G
Gräf, D
Kenis, Karine
Depas, Michel
Mertens, Paul
Lambert, U
Heyns, Marc
Claeys, Cor
Richter, H
Wagner, Patrick #
Issue Date: 1996
Host Document: pages:331-6
Conference: Defect Recognition and Image Processing in Semiconductors 1995. Proceedings of the Sixth International Conference; 3-6 Dec. 1995 location:Leuven Belgium
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Clinical Residents Medicine
Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
Surface and Interface Engineered Materials
Surface and Interface Engineered Materials
× corresponding author
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.

© Web of science