Title: Grain growth, stress, and impurities in electroplated copper
Authors: Brongersma, Sywert ×
Kerr, Emma
Vervoort, Iwan
Saerens, Annelies
Maex, Karen #
Issue Date: 2002
Series Title: Journal of Materials Research vol:17 issue:3 pages:582-589
ISSN: 0884-2914
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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