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Title: Study of CoSi2 formation from a Co-Ni alloy
Authors: Chamirian, Oxana ×
Steegen, An
Bender, Hugo
Lauwers, Anne
de Potter de ten Broeck, Muriel
Marabelli, F
Maex, Karen #
Issue Date: 2002
Series Title: Microelectronic Engineering vol:60 issue:01/02/07 pages:221-230
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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