ITEM METADATA RECORD
Title: Impact of three-dimensional lateral current flow on ultrashallow spreading resistance profiles
Authors: Clarysse, Trudo ×
Caymax, Matty
Vandervorst, Wilfried #
Issue Date: 2002
Series Title: Applied Physics Letters vol:80 issue:13 pages:2407-2409
ISSN: 0003-6951
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy

 




All items in Lirias are protected by copyright, with all rights reserved.

© Web of science