Title: Impact of three-dimensional lateral current flow on ultrashallow spreading resistance profiles
Authors: Clarysse, Trudo ×
Caymax, Matty
Vandervorst, Wilfried #
Issue Date: 2002
Series Title: Applied Physics Letters vol:80 issue:13 pages:2407-2409
ISSN: 0003-6951
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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