|ITEM METADATA RECORD
|Title: ||Carrier illumination for monitoring of CMOS ultra-shallow junctions|
|Authors: ||Clarysse, Trudo|
|Issue Date: ||2002 |
|Conference: ||E-MRS Spring Meeting Symposium E: Advanced Characterisation of Semiconductor Materials and Devices location:Leuven Belgium date:18/06/02|
|Publication status: ||published|
|KU Leuven publication type: ||DI|
|Appears in Collections:||Electrical Engineering - miscellaneous|
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