Title: Carrier illumination for monitoring of CMOS ultra-shallow junctions
Authors: Clarysse, Trudo
Vandervorst, Wilfried
Lindsay, Richard
Borden, P
Budiarto, E
Issue Date: 2002
Conference: E-MRS Spring Meeting Symposium E: Advanced Characterisation of Semiconductor Materials and Devices location:Leuven Belgium date:18/06/02
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Electrical Engineering - miscellaneous

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