ITEM METADATA RECORD
Title: Electric stress-induced degradation of thin oxide layers and its impact on device reliability
Authors: Degraeve, Robin ×
Kaczer, Ben
Roussel, Philippe
Groeseneken, Guido #
Issue Date: 2002
Publisher: Electrochemical Society
Host Document: pages:475-488
Conference: Semiconductor Silicon 2002. Proceedings of the 9th International Symposium on Silicon Materials Science and Technology location:Leuven Belgium date:13/05/02
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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