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Title: Detailed study of scanning capacitance microscopy on cross- sectional and beveled junctions
Authors: Duhayon, Natasja ×
Clarysse, Trudo
Eyben, Pierre
Vandervorst, Wilfried
Hellemans, Louis #
Issue Date: Mar-2002
Publisher: Published for the Society by the American Institute of Physics
Series Title: Journal of Vacuum Science & Technology B, Microelectronics and Nanometer Structures vol:20 issue:2 pages:741-746
ISSN: 1071-1023
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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