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Title: Scanning spreading resistance microscopy and spectroscopy for routine and quantitative two-dimensional carrier profiling
Authors: Eyben, Pierre ×
Xu, Mingwei
Duhayon, Natasja
Clarysse, Trudo
Callewaert, Sven
Vandervorst, Wilfried #
Issue Date: Jan-2002
Publisher: Published for the Society by the American Institute of Physics
Series Title: Journal of Vacuum Science & Technology B, Microelectronics and Nanometer Structures vol:20 issue:1 pages:471-478
ISSN: 1071-1023
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
Solid State Physics and Magnetism Section
× corresponding author
# (joint) last author

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