|ITEM METADATA RECORD
|Title: ||Effect of implantation oxide on the silicidation of narrow diffused and poly-lines|
|Authors: ||Naem, Abdalla|
de Potter de ten Broeck, Muriel
|Issue Date: ||1997 |
|Conference: ||Materials Research Society 1997 Spring Meeting : Symposium on Multilevel Metal Process Integration; April 1-2, 1997; San Francis|
|Publication status: ||published|
|KU Leuven publication type: ||DI|
|Appears in Collections:||Associated Section of ESAT - INSYS, Integrated Systems|
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