Title: Effect of implantation oxide on the silicidation of narrow diffused and poly-lines
Authors: Naem, Abdalla
Lauwers, A
de Potter de ten Broeck, Muriel
Maex, Karen
Issue Date: 1997
Conference: Materials Research Society 1997 Spring Meeting : Symposium on Multilevel Metal Process Integration; April 1-2, 1997; San Francis
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems

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