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Title: Platinum template layer for texture control in PZT fecaps with reactively sputtered RuO2 electrode layers
Authors: Norga, Gerd
Wouters, D
Maes, Herman
Issue Date: 1997
Conference: Materials Research Society 1997 Fall Meeting : Symposium on Ferroelectric Thin Films VI; Nov.30 - Dec.5, 1997; Boston, Mass., US location:Leuven Belgium
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems

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