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Title: Control of texture and oxygen stoichiometry in reactively sputtered RuO2 electrode layers for low fatigue PZT FECAPs
Authors: Norga, Gerd
Wouters, D. J
Conard, Thierry
Maes, Herman
Issue Date: 1997
Conference: COST 514 Workshop on Ferroelectric Thin Films; April 14-15, 1997; Parma, Italy. location:Leuven Belgium
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems

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