Title: Characterization of reduced-pressure chemical vapor deposition polycrystalline silicon germanium deposited at temperatures <= 550 degrees C
Authors: Sedky, S ×
Witvrouw, Ann
Caymax, Matty
Saerens, A
Van Houtte, Paul #
Issue Date: 2002
Series Title: Journal of Materials Research vol:17 issue:7 pages:1580-1586
ISSN: 0884-2914
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Mechanical Metallurgy Section (-)
× corresponding author
# (joint) last author

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