Title: Measurement of nonuniform stresses in semiconductor films by optical methods
Authors: Pinardi, Kuntjoro
Jain, Suresh
Maes, Herman
Van Overstraeten, Roger
Willander, M
Atkinson, A
Issue Date: 1997
Conference: Materials Research Society 1997 Fall Meeting : Symposium on Thin Film Stresses and Mechanical Properties; December 1-5, 1997; Bo
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.