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Title: Stress relaxation in Al(Cu) thin films
Authors: Proost, Joris ×
Witvrouw, Ann
Cosemans, P
Roussel, Philippe
Maex, Karen #
Issue Date: 1997
Series Title: Microelectronic Engineering vol:33 pages:137-147
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Department of Materials Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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