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Title: Characterisation and integration feasibility of JSR's low-k dielectric LKD-5109
Authors: Das, Arabinda ×
Kokubo, Terukazu
Furukawa, Yukiko
Struyf, Herbert
Vos, Ingrid
Sijmus, Bram
Iacopi, Francesca
Van Aelst, Joke
Le, Quoc Toan
Carbonell, Laure
Brongersma, Sywert
Maenhoudt, Mireille
Tokei, Zsolt
Vervoort, Iwan
Sleeckx, Erik
Stucchi, Michele
Schaekers, Marc
Boullart, Werner
Rosseel, Erik
Van Hove, Marleen
Vanhaelemeersch, Serge
Shiota, A
Maex, Karen #
Issue Date: 2002
Series Title: Microelectronic Engineering vol:64 issue:01/04/07 pages:25-33
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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