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Title: Experimental characterization of stiction due to charging in RF MEMS
Authors: van Spengen, Willem Merlijn ×
Puers, Robert
Mertens, Robert
De Wolf, Ingrid #
Issue Date: 2002
Publisher: IEEE
Host Document: pages:901-904
Conference: IEDM Technical Digest location:Leuven Belgium date:09/12/02
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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