This item still needs to be validated !
Title: A physical model to predict stiction in MEMS
Authors: van Spengen, Willem Merlijn ×
Puers, Robert
De Wolf, Ingrid #
Issue Date: 2002
Publisher: IOP
Series Title: Journal of micromechanics and microengineering: structures, devices and systems vol:12 issue:5 pages:702-713
ISSN: 0960-1317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.

© Web of science